Plasma Treatment Systems
High-uniformity plasma surface treatment for wafer-level (WLP) and panel-level (PLP) packaging applications. The SPHERE Series delivers advanced plasma surface treatment designed to maximize uniformity, repeatability, and throughput across wafer-level and panel-level packaging applications. Built around a patented three-axis symmetrical plasma chamber, SPHERE systems ensure consistent treatment across every substrate while maintaining tight process control for reliable, repeatable production. At the core of the SPHERE Series is a commitment to process precision — delivering uniform plasma treatment, short cycle times, and production-ready automation to improve yield, reduce variability, and enhance downstream adhesion and reliability. Superior plasma treatment for panel-level packaging. The ExoSPHERE system is engineered for high-throughput plasma treatment for panel-level applications. Its symmetrical chamber architecture delivers uniform activation and cleaning across large surfaces, enabling improved adhesion and void-free underfill results. The system accommodates diverse product formats — including panels, wafers, carriers, strips, and JEDEC/Auer® boats — and integrates easily into automated or standalone production environments. SMARTTune™ plasma management ensures fast setup and stable operation, minimizing downtime while maintaining process consistency. Ideal for: Superior plasma treatment for wafer-level packaging. The StratoSPHERE platform is optimized for wafer-level applications and supports wafers up to 300 mm (12 inches). Its plasma confinement and chamber symmetry deliver high uniformity and repeatability. Designed for high throughput, the system features modular configurations, advanced wafer handling, and rapid changeover capability — enabling efficient operation across diverse wafer processes. Ideal for: You can be confident when choosing Nordson Electronics Solutions as your fluid dispensing partner. Our commitment to innovation, investment in R&D, and customer service excellence allow us to deliver performance and reliability consistently.
