Accuracy±0.76 µm (±0.000030 in.) / ±1.5 µm (±0.000060 in.)
Scan Rate100/sec / 100/sec
CalibrationFactory calibrated / Factory calibrated
Repeatability±0.25 µm (0.000010 in.) / ±0.5 µm (0.000020 in.)
Measurement Range0.100 to 25.4 mm (0.004 to 1.0 in.) / 0.254 to 50 mm (0.010 to 2.0 in.)
Laser Beam Velocity50 m/sec. (2,000 in./sec.) / 100 m/sec. (4,000 in./sec.)
Temperature Coefficient<0.2 µm/°C (<0.000004 in./°F) / <0.2 µm/°C (<0.000004 in./°F)
Measurement Area Depth of Field±.75 x 25 mm (±0.030 x 1.0 in.) / ±1.5 x 50 mm (±0.060 x 2.0 in.)